APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society, Ghanbari, A., & Toprac, A. J. (1997). Process, equipment, and materials control in integrated circuit manufacturing III: 1-2 October 1997, Austin, Texas. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society, Abe Ghanbari, and Anthony J. Toprac. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III: 1-2 October 1997, Austin, Texas. Bellingham, Wash., USA: SPIE, 1997.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III: 1-2 October 1997, Austin, Texas. SPIE, 1997.