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Microelectronic device technology : 1-2 October 1997, Austin, Texas /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society
Other Authors: Rodder, Mark
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1997]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3212.
Subjects:
Semiconductors > Congresses.
Semiconductors > Design and construction > Congresses.
Microelectronics > Congresses.

Remote Storage

Holdings details from Remote Storage
Call Number: TK7871.85 .M516 1997
 
Call Number Status Get It
TK7871.85 .M516 1997 Available