APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society, DeBusk, D., & Ajuria, S. (1997). In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing: 1-2 October 1997, Austin, Texas. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society, Damon DeBusk, and Sergio Ajuria. In-line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing: 1-2 October 1997, Austin, Texas. Bellingham, Wash., USA: SPIE, 1997.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. In-line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing: 1-2 October 1997, Austin, Texas. SPIE, 1997.