Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, United States. Defense Advanced Research Projects Agency
Other Authors: Motamedi, M. Edward, Hornbeck, Larry J., Pister, Kristofer S. J.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1997]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3008.
Subjects:
Description
Physical Description:viii, 382 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819424196