Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, United States. Defense Advanced Research Projects Agency
Other Authors:	Motamedi, M. Edward, Hornbeck, Larry J., Pister, Kristofer S. J.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1997]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3008.
Subjects:	Integrated optics > Congresses. Miniature electronic equipment > Congresses. Micromechanics > Congresses. Optical scanners > Congresses.

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