Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumention Engineers, Semiconductor Equipment and Materials International, SEMATECH (Organization)
Other Authors: Tarascon-Auriol, Rʹegine G.
Format: Book
Language:English
Published: Bellingham, Washington : International Society for Optical Engineering, [1997]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3049.
Subjects:
Online Access:https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/3049.toc

Internet

https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/3049.toc

Remote Storage

Holdings details from Remote Storage
Call Number: TK7874 .A25 1997
 
Call Number Status Get It
TK7874 .A25 1997 Available