Rapid thermal processing of semiconductors /

Bibliographic Details
Main Author:	Borisenko, V. E. (Viktor Evgenévich)
Other Authors:	Hesketh, P. J. (Peter J.)
Format:	Book
Language:	English
Published:	New York : Plenum Press, [1997]
Series:	Language of science. Microdevices.
Subjects:	Semiconductors > Design and construction. Rapid thermal processing.

Description
Physical Description:	xxii, 358 pages : illustrations ; 26 cm.
Bibliography:	Includes bibliographical references (pages 301-353) and index.
ISBN:	0306450542