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Rapid thermal processing of semiconductors /

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Bibliographic Details
Main Author: Borisenko, V. E. (Viktor Evgenévich)
Other Authors: Hesketh, P. J. (Peter J.)
Format: Book
Language:English
Published: New York : Plenum Press, [1997]
Series:Language of science.
Microdevices.
Subjects:
Semiconductors > Design and construction.
Rapid thermal processing.

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Call Number: TK7871.85 .B64 1997
 
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TK7871.85 .B64 1997 Available