Cover Image

Micromechanics and MEMS : classic and seminal papers to 1990 /

Bibliographic Details
Corporate Author: Institute of Electrical and Electronics Engineers
Other Authors: Trimmer, W.
Format: Book
Language:English
Published: New York : IEEE Press, [1997]
Subjects:
Microelectronics.
Electromechanical devices.
Micromechanics.
Actuators.
Description
Item Description:"A selected reprint volume."
Physical Description:xv, 701 pages : illustrations ; 29 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0780310853 (cloth)