Micromechanics and MEMS : classic and seminal papers to 1990 /

Bibliographic Details

Corporate Author:	Institute of Electrical and Electronics Engineers
Other Authors:	Trimmer, W.
Format:	Book
Language:	English
Published:	New York : IEEE Press, [1997]
Subjects:	Microelectronics. Electromechanical devices. Micromechanics. Actuators.