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Microsystem technology and microrobotics /

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Bibliographic Details
Main Author: Fatikow, S. (Sergej), 1960-
Other Authors: Rembold, Ulrich
Format: Book
Language:English
Published: Berlin ; New York : Springer, [1997]
Subjects:
Electromechanical devices > Design and construction.
Microfabrication.
Robotics.
Description
Physical Description:xii, 408 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references (pages [366]-401) and index.
ISBN:3540606580 (hc : alk. paper)