Microsystem technology and microrobotics /

Bibliographic Details
Main Author:	Fatikow, S. (Sergej), 1960-
Other Authors:	Rembold, Ulrich
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer, [1997]
Subjects:	Electromechanical devices > Design and construction. Microfabrication. Robotics.

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