Microelectromechanical systems (MEMS) : microscale thermal phenomena in electronic systems, applications of miocrofabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia /

Bibliographic Details
Corporate Authors:	International Mechanical Engineering Congress and Exposition, American Society of Mechanical Engineers. Dynamic Systems and Control Division
Other Authors:	Avedisian, C. T.
Format:	Conference Proceeding Book
Language:	English
Published:	New York, N.Y. : American Society of Mechanical Engineers, [1996]
Series:	DSC (Series) ; vol. 59.
Subjects:	Microelectronics > Congresses. Electromechanical devices > Congresses.

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