Handbook of microlithography, micromachining, and microfabrication /
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA : London, UK :
SPIE Optical Engineering Press ; Institution of Electrical Engineers,
[1997-]
|
| Series: | IEE materials & devices series ;
12. |
| Subjects: |
| Item Description: | "SPIE Press monograph PM39." |
|---|---|
| Physical Description: | volumes <1 > : illustrations ; 26 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819423785 (v. 1) |