Cover Image

Handbook of microlithography, micromachining, and microfabrication /

Bibliographic Details
Other Authors: Rai-Choudhury, P.
Format: Book
Language:English
Published: Bellingham, Wash., USA : London, UK : SPIE Optical Engineering Press ; Institution of Electrical Engineers, [1997-]
Series:IEE materials & devices series ; 12.
Subjects:
Microlithography.
Micromachining.
Microfabrication.

Evans: Library Stacks

Holdings details from Evans: Library Stacks
Call Number: TK7836 .H3423 1997
Library Owns: TK7836 .H3423 1997 (v.1-v.2)
Call Number Status Get It
TK7836 .H3423 1997 v.1 Available
TK7836 .H3423 1997 v.2 Available