Symposium on Photomask Technology and Management Redwood City, Calif, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Shelden, G. V., & Reynolds, J. A. (1996). 16th Annual Symposium on Photomask Technology and Management: Proceedings : 18-20 September 1996, Redwood City, California. SPIE.
Chicago Style (17th ed.) CitationSymposium on Photomask Technology and Management Redwood City, Calif, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Gilbert V. Shelden, and James A. Reynolds. 16th Annual Symposium on Photomask Technology and Management: Proceedings : 18-20 September 1996, Redwood City, California. Bellingham, Wash.: SPIE, 1996.
MLA (9th ed.) CitationSymposium on Photomask Technology and Management Redwood City, Calif, et al. 16th Annual Symposium on Photomask Technology and Management: Proceedings : 18-20 September 1996, Redwood City, California. SPIE, 1996.