Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado /
| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE,
[1996]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2862. |
| Subjects: |
| Physical Description: | vii, 188 pages : illustrations ; 28 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819422509 |