Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Stover, John C.
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE, [1996]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2862.
Subjects:	Semiconductor wafers > Measurement > Congresses. Surface roughness > Measurement > Congresses. Flatness measurement > Congresses.

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