Micromechanical systems, 1993 : presented at the 1993 ASME Winter Annual Meeting, New Orleans, Louisiana, November 28-December 3, 1993 /

Bibliographic Details
Corporate Authors:	American Society of Mechanical Engineers. Winter Annual Meeting, American Society of Mechanical Engineers. Dynamic Systems and Control Division
Other Authors:	Pisano, A. (Al), Jara-Almonte, J. (James), Trimmer, W.
Format:	Book
Language:	English
Published:	New York : The Society, [1993]
Series:	DSC (Series) ; vol. 46.
Subjects:	Micromechanics > Congresses. Microelectronics > Congresses. Detectors > Congresses. Actuators > Congresses. Electromechanical devices > Congresses.

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