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Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October 1996, Austin, Texas /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors: Iturralde, Armando, Lin, Te-Hua
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1996]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2876.
Subjects:
Integrated circuits > Design and construction > Congresses.
Plasma etching > Congresses.
Metallizing > Congresses.
Dielectric films > Congresses.
Description
Physical Description:vii, 258 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819422746