Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October 1996, Austin, Texas /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors:	Iturralde, Armando, Lin, Te-Hua
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1996]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2876.
Subjects:	Integrated circuits > Design and construction > Congresses. Plasma etching > Congresses. Metallizing > Congresses. Dielectric films > Congresses.

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