Advances in resist technology and processing XIII : 11-13 March 1996, Santa Clara, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, SEMATECH (Organization)
Other Authors: Kunz, Roderick R.
Format: Book
Language:English
Published: Bellingham, Wash., USA : International Society for Optical Engineering, [1996]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1086.
Subjects:
Online Access:https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/1086.toc

Internet

https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/1086.toc

Remote Storage

Holdings details from Remote Storage
Call Number: TK7874 .A25 1996
 
Call Number Status Get It
TK7874 .A25 1996 Available