Cover Image

Micromachined devices and components II : 14-15 October, 1996, Austin, Texas /

Bibliographic Details
Corporate Authors: Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, National Institute of Standards and Technology (U.S.)
Other Authors: Chau, Kevin, Roop, Ray
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1996]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2882.
Subjects:
Microelectromechanical systems > Congresses.
Micromachining > Congresses.
Description
Physical Description:ix, 340 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819422800 (pbk.)
9780819422804 (pbk.)