Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.)
Other Authors:	Motamedi, M. Edward, Bailey, Wayne E.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1996]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2881.
Subjects:	Microelectronics > Congresses. Micromechanics > Congresses. Optics > Congresses.

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