Wafer fabrication : factory performance and analysis /

Bibliographic Details
Main Author:	Atherton, Linda F.
Other Authors:	Atherton, Robert W.
Format:	Book
Language:	English
Published:	Boston : Kluwer Academic Publishers, [1995]
Series:	Kluwer international series in engineering and computer science ; SECS 339. Kluwer international series in engineering and computer science. Microelectronics manufacturing.
Subjects:	Semiconductor wafers > Design and construction. Factory management. Semiconductors

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