Cover Image

IEEE, the Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, San Diego, California, USA, February 11-15, 1996 /

Bibliographic Details
Corporate Authors: IEEE Workshop on Micro Electro Mechanical Systems San Diego, Calif., IEEE Robotics and Automation Society
Format: Conference Proceeding Book
Language:English
Published: [New York, N.Y.] : Piscataway, N.J. : Institute of Electrical and Electronics Engineers ; IEEE Service Center, [1996]
Subjects:
Electromechanical devices > Congresses.
Microelectronics > Congresses.
Detectors > Congresses.
Actuators > Congresses.
Description
Item Description:"IEEE catalog number 96CH35856"--Title page verso.
Physical Description:xxiv, 530 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0780329864 (casebound)
0780329856 (softbound)
0780329872 (microfiche)