IEEE, the Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, San Diego, California, USA, February 11-15, 1996 /

Bibliographic Details
Corporate Authors:	IEEE Workshop on Micro Electro Mechanical Systems San Diego, Calif., IEEE Robotics and Automation Society
Format:	Conference Proceeding Book
Language:	English
Published:	[New York, N.Y.] : Piscataway, N.J. : Institute of Electrical and Electronics Engineers ; IEEE Service Center, [1996]
Subjects:	Electromechanical devices > Congresses. Microelectronics > Congresses. Detectors > Congresses. Actuators > Congresses.

Evans: Library Stacks