Eleventh topical conference on radio frequency power in plasmas : Palm Springs, CA, May 1995 /

Bibliographic Details
Corporate Authors:	Topical Conference on Radio Frequency Power in Plasmas Palm Springs, Calif., American Institute of Physics
Other Authors:	Prater, Ronald, Chan, Vincent S.
Format:	Conference Proceeding Book
Language:	English
Published:	Woodbury, N.Y. : AIP Press, [1996]
Series:	AIP conference proceedings ; no. 355.
Subjects:	Plasma (Ionized gases) > Congresses. Plasma heating > Congresses. Radio frequency > Congresses.

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