Modeling of three dimensional defects in integrated circuits /

Although the majority of defects found in manufacturing lines of Integrated Circuits [ IC's] have predominantly 2- Dimensional [2D] effects, there are many situations in which 2D defect models do not suffice) e.g., tall layer bulks disrupting the continuity of subsequent layers, abrupt surface...

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Bibliographic Details

Main Author:	Dani, Sameer Manohar, 1968-
Format:	Thesis eBook
Language:	English
Published:	[Place of publication not identified] : [publisher not identified] ; 1993.
Subjects:	Major electrical engineering.
Online Access:	Link to OAKTrust copy