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Principles of plasma discharges and materials processing /

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Bibliographic Details
Main Author: Lieberman, M. A. (Michael A.)
Other Authors: Lichtenberg, Allan J.
Format: Book
Language:English
Published: New York : Wiley, [1994]
Subjects:
Plasma dynamics.
Thin films > Surfaces.
Plasma etching.
Plasma chemistry.
Plasmas > Physics
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by Lieberman, M. A. (Michael A.)
Published 2005
Book
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