Principles of plasma discharges and materials processing /

Bibliographic Details
Main Author:	Lieberman, M. A. (Michael A.)
Other Authors:	Lichtenberg, Allan J.
Format:	Book
Language:	English
Published:	New York : Wiley, [1994]
Subjects:	Plasma dynamics. Thin films > Surfaces. Plasma etching. Plasma chemistry. Plasmas > Physics

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