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Principles of plasma discharges and materials processing /

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Bibliographic Details
Main Author: Lieberman, M. A. (Michael A.)
Other Authors: Lichtenberg, Allan J.
Format: Book
Language:English
Published: New York : Wiley, [1994]
Subjects:
Plasma dynamics.
Thin films > Surfaces.
Plasma etching.
Plasma chemistry.
Plasmas > Physics
Description
Item Description:"A Wiley-Interscience publication."
Physical Description:xxvi, 572 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages 559-564) and index.
ISBN:0471005770