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Plasma deposition of amorphous silicon-based materials /

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Bibliographic Details
Other Authors: Bruno, Giovanni, Capezzuto, Pio, Madan, A. (Arun)
Format: Book
Language:English
Published: Boston : Academic Press, [1995]
Series:Plasma--materials interactions.
Subjects:
Amorphous semiconductors > Design and construction.
Silicon alloys.
Plasma-enhanced chemical vapor deposition.
Description
Physical Description:xi, 324 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:012137940X (alk. paper)