Plasma deposition of amorphous silicon-based materials /

Bibliographic Details
Other Authors:	Bruno, Giovanni, Capezzuto, Pio, Madan, A. (Arun)
Format:	Book
Language:	English
Published:	Boston : Academic Press, [1995]
Series:	Plasma--materials interactions.
Subjects:	Amorphous semiconductors > Design and construction. Silicon alloys. Plasma-enhanced chemical vapor deposition.

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