APA (7th ed.) Citation

Symposium on Photomask Technology and Management Santa Clara, Calif, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Sheldon, G. V., & Wiley, J. N. (1995). 15th Annual Symposium on Photomask Technology and Management: Proceedings : 20-22 September, 1995, Santa Clara, California. SPIE--the International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Symposium on Photomask Technology and Management Santa Clara, Calif, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Gilbert V. Sheldon, and James N. Wiley. 15th Annual Symposium on Photomask Technology and Management: Proceedings : 20-22 September, 1995, Santa Clara, California. Bellingham, Wash.: SPIE--the International Society for Optical Engineering, 1995.

MLA (9th ed.) Citation

Symposium on Photomask Technology and Management Santa Clara, Calif, et al. 15th Annual Symposium on Photomask Technology and Management: Proceedings : 20-22 September, 1995, Santa Clara, California. SPIE--the International Society for Optical Engineering, 1995.