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Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas /

Bibliographic Details
Corporate Authors: Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers
Other Authors: Bailey, Wayne E.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1995]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2641.
Subjects:
Microelectronics > Congresses.
Micromechanics > Congresses.
Optics > Congresses.
Description
Physical Description:v, 154 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819420077