Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas /

Bibliographic Details
Corporate Authors:	Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers
Other Authors:	Bailey, Wayne E.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1995]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2641.
Subjects:	Microelectronics > Congresses. Micromechanics > Congresses. Optics > Congresses.

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