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Advanced metallization for ULSI applications for 1994 : proceedings of the conference held October 4-6, 1994 in Austin, Texas, U.S.A. /

Bibliographic Details
Corporate Authors: University of California, Berkeley. Continuing Education in Engineering, Advanced Metallization for ULSI Applications Conference
Other Authors: Blumenthal, Roc, Janssen, Guido
Format: Conference Proceeding Book
Language:English
Published: Pittsburgh, Pa. : Materials Research Society, [1995]
Series:Materials Research Society conference proceedings.
Subjects:
Integrated circuits > Ultra large scale integration > Materials > Congresses.
Vapor-plating > Congresses.
Electrochemical metallizing > Congresses.
Description
Item Description:"Papers presented at the Advanced Metallization for ULSI Application Conference"--Pref.
"Sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California U.S.A."
Physical Description:xv, 564 pages : illustrations ; 24 cm.
ISBN:1558992790
ISSN:1048-0854