Advanced metallization for ULSI applications for 1994 : proceedings of the conference held October 4-6, 1994 in Austin, Texas, U.S.A. /

Bibliographic Details
Corporate Authors:	University of California, Berkeley. Continuing Education in Engineering, Advanced Metallization for ULSI Applications Conference
Other Authors:	Blumenthal, Roc, Janssen, Guido
Format:	Conference Proceeding Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, [1995]
Series:	Materials Research Society conference proceedings.
Subjects:	Integrated circuits > Ultra large scale integration > Materials > Congresses. Vapor-plating > Congresses. Electrochemical metallizing > Congresses.

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