Proceedings, IEEE micro electro mechanical systems /

Bibliographic Details
Corporate Authors:	IEEE Robotics and Automation Society, American Society of Mechanical Engineers. Dynamic Systems and Control Division, IEEE Workshop on Micro Electro Mechanical Systems
Format:	Conference Proceeding Book
Language:	English
Published:	[New York] : Institute of Electrical and Electronics Engineers, [1995]
Subjects:	Electromechanical devices > Congresses. Microelectronics > Congresses. Detectors > Congresses. Actuators > Congresses.

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