Cover Image

Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas /

Bibliographic Details
Corporate Authors: National Institute of Standards and Technology (U.S.), Society of Photo-optical Instrumentation Engineers
Other Authors: Markus, Karen W.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1995]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2639.
Subjects:
Micromechanics > Congresses.
Microfabrication > Congresses.
Electromechanical devices > Design and construction > Congresses.
Description
Physical Description:vii, 336 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819420050
9780819420053