Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas /

Bibliographic Details
Corporate Authors:	National Institute of Standards and Technology (U.S.), Society of Photo-optical Instrumentation Engineers
Other Authors:	Markus, Karen W.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1995]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2639.
Subjects:	Micromechanics > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses.

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