APA (7th ed.) Citation

National Institute of Standards and Technology (U.S.), Society of Photo-optical Instrumentation Engineers, & Markus, K. W. (1995). Micromachining and microfabrication process technology: 23-24 October, 1995, Austin, Texas. SPIE.

Chicago Style (17th ed.) Citation

National Institute of Standards and Technology (U.S.), Society of Photo-optical Instrumentation Engineers, and Karen W. Markus. Micromachining and Microfabrication Process Technology: 23-24 October, 1995, Austin, Texas. Bellingham, Wash., USA: SPIE, 1995.

MLA (9th ed.) Citation

National Institute of Standards and Technology (U.S.), et al. Micromachining and Microfabrication Process Technology: 23-24 October, 1995, Austin, Texas. SPIE, 1995.