Cover Image

Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Sabnis, Anant G., Raaijmakers, Ivo J.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1995]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2637.
Subjects:
Integrated circuits > Design and construction > Congresses.
Plasma etching > Congresses.
Metallizing > Congresses.
Dielectric films > Congresses.
Description
Physical Description:vii, 238 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819420034