Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Sabnis, Anant G., Raaijmakers, Ivo J.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1995]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2637.
Subjects:	Integrated circuits > Design and construction > Congresses. Plasma etching > Congresses. Metallizing > Congresses. Dielectric films > Congresses.

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