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Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Mathur, Jagdish P., Lowell, John, Chen, Ray T.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1995]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2638.
Subjects:
Semiconductors > Design and construction > Congresses.
Integrated circuits > Design and construction > Congresses.
Semiconductors > Testing > Optical methods > Congresses.
Integrated circuits > Testing > Optical methods > Congresses.
Optical pattern recognition > Congresses.
Description
Physical Description:ix, 302 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819420042