Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Mathur, Jagdish P., Lowell, John, Chen, Ray T.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1995]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2638.
Subjects:	Semiconductors > Design and construction > Congresses. Integrated circuits > Design and construction > Congresses. Semiconductors > Testing > Optical methods > Congresses. Integrated circuits > Testing > Optical methods > Congresses. Optical pattern recognition > Congresses.

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