Cover Image

Optical/laser microlithography VIII : 22-24 February 1995, Santa Clara, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors: Brunner, Timothy A.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE, [1995]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2440.
Subjects:
Microlithography > Congresses.
Masks (Electronics) > Congresses.
Photoresists > Congresses.
Microlithography > Computer simulation > Congresses.
Lenses > Design and construction > Congresses.
Description
Physical Description:xii, 948 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819417882 (pbk.)