Optical/laser microlithography VIII : 22-24 February 1995, Santa Clara, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors:	Brunner, Timothy A.
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE, [1995]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2440.
Subjects:	Microlithography > Congresses. Masks (Electronics) > Congresses. Photoresists > Congresses. Microlithography > Computer simulation > Congresses. Lenses > Design and construction > Congresses.

Remote Storage