Electrical characterization of silicon-on-insulator materials and devices /
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Boston :
Kluwer Academic,
[1995]
|
| Series: | Kluwer international series in engineering and computer science ;
SECS 305. Kluwer international series in engineering and computer science. Electronic materials, science and technology. |
| Subjects: |
| Physical Description: | xiv, 381 pages : illustrations ; 25 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0792395484 (acid-free) |